Thickness management in three-dimensional laser manufacturing of suspended structures in a single SU-8 layer
作者： Biao Li , Aurelien Gueit , Andre Sharon
DOI: 10.1063/1.2204583
关键词:
摘要: Cantilevers, embedded channels, microcavities, and other high-aspect-ratio geometries requiring gaps between layers are essential to microfluidic components used for biotech/biomedical applications. Intensive efforts have been expanded in the development of novel approaches efficiently manufacturing suspended structures. We recently demonstrated a three-dimensional (3D) fabrication technique rapid processing structures using scanning laser system [B. Li et al. Appl. Phys. Lett. 85, 2426 (2004)]. This enables spot-by-spot pulsing both in-plane in-depth (parallel film thickness) processing. Its maskless feature allows prototyping multilevel at low cost. article describes our latest results thickness management 3D technique. Suspended beams various thicknesses fabricated by modifying grid size, energy, degree focus. Towards this end, we a...
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