Design, fabrication, and test of an on-chip micro flow cytometer with integrated out-of-plane microlenses
作者： Guocheng Shao , Wanjun Wang
DOI: 10.1007/S00542-010-1097-6
关键词: Optical fiber 、 Zemax 、 Integrated design 、 Photoresist 、 Engineering 、 Microlens 、 Optics 、 Lithography 、 Fabrication 、 System on a chip
摘要: … A micro flow cytometer with an integrated three-dimensional hydro-… micro flow cytometer system and the experimental results proved the feasibility of the integrated micro flow cytometer …
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sci-hub.se 参考文章(14)
Alice Longobardi Givan, Flow cytometry : first principles ,(1992)
A. Manz, N. Graber, H.M. Widmer, Miniaturized total chemical analysis systems: A novel concept for chemical sensing Sensors and Actuators B: Chemical. ,vol. 1, pp. 244- 248 ,(1990) , 10.1016/0925-4005(90)80209-I
D. F. P. Pile, D. K. Gramotnev, Nanoscale Fabry-Perot interferometer using channel plasmon-polaritons in triangular metallic grooves Applied Physics Letters. ,vol. 86, pp. 161101- ,(2005) , 10.1063/1.1905799
Ren Yang, Wanjun Wang, Out-of-plane polymer refractive microlens fabricated based on direct lithography of SU-8 Sensors and Actuators A-physical. ,vol. 113, pp. 71- 77 ,(2004) , 10.1016/J.SNA.2004.02.018
Che-Hsin Lin, Gwo-Bin Lee, None, Micromachined flow cytometers with embedded etched optic fibers for optical detection Journal of Micromechanics and Microengineering. ,vol. 13, pp. 447- 453 ,(2003) , 10.1088/0960-1317/13/3/315
Jamil El-Ali, Peter K. Sorger, Klavs F. Jensen, Cells on chips Nature. ,vol. 442, pp. 403- 411 ,(2006) , 10.1038/NATURE05063
Ju-Nan Kuo, Chia-Chun Hsieh, Sung-Yi Yang, Gwo-Bin Lee, An SU-8 microlens array fabricated by soft replica molding for cell counting applications Journal of Micromechanics and Microengineering. ,vol. 17, pp. 693- 699 ,(2007) , 10.1088/0960-1317/17/4/004
V. Nazmov, E. Reznikova, J. Mohr, A. Snigirev, I. Snigireva, S. Achenbach, V. Saile, Fabrication and preliminary testing of X-ray lenses in thick SU-8 resist layers Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems. ,vol. 10, pp. 716- 721 ,(2004) , 10.1007/S00542-004-0433-0
Ren Yang, Wanjun Wang, Steven A. Soper, Out-of-plane microlens array fabricated using ultraviolet lithography Applied Physics Letters. ,vol. 86, pp. 161110- ,(2005) , 10.1063/1.1901829
Ren Yang, Daniel L. Feeback, Wanjun Wang, Microfabrication and test of a three-dimensional polymer hydro-focusing unit for flow cytometry applications Sensors and Actuators A-physical. ,vol. 118, pp. 259- 267 ,(2005) , 10.1016/J.SNA.2004.09.001