Ultrathin-film gas detector
作者： Johannes Schwank , Kensall D. Wise , Christy L. Johnson
DOI:
关键词: Analytical chemistry 、 Gas detector 、 Silicon 、 Conductivity 、 Optoelectronics 、 Dielectric 、 Materials science 、 Substrate (electronics) 、 Electrode 、 Window (computing) 、 Thin metal
摘要: A device for detecting a gaseous species including (i) silicon substrate having two major surfaces and comprising dielectric window region (ii) heater situated on the one surface; (iii) conductivity cell electrode thin metal transducing film assembly other surface is disclosed. The contacts electrode.
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