Composition sensor with minimal non-linear thermal gradients
作者： Robert G. Johnson
DOI:
关键词: Nonlinear system 、 Single crystal silicon 、 Substrate (electronics) 、 Thermal 、 Diaphragm (mechanical device) 、 Composite material 、 Microstructure 、 Thin film 、 Planar 、 Optics 、 Materials science
摘要: A gaseous composition sensor which is a microstructure device comprising heated planar thin film diaphragm member suspended over shallow flat bottomed etched pit in single crystal silicon substrate.
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