Microcantilever-based gas sensor employing two simultaneous physical sensing modes

摘要: According to one embodiment, a system for detecting and identifying gases includes piezoresistive microcantilever transducer, wherein dissipation of heat from the into or more is measured by changes in an electrical resistance piezoresistor, vibrating shifts are resonant frequency due viscous damping thereof gases, subsystem correlating gases. In another method determining Other systems, methods, computer program products also described according embodiments.