Micro-hotplate devices and methods for their fabrication

摘要: A design and fabrication methodology, for silicon micromachined micro-hotplates which are manufactured using commercial CMOS foundries techniques with additional post-fabrication processing. The adaptable a host of applications. methodology the is based on compatible micromachining techniques. novel aspects in design, choice layout materials layers, applications devices. have advantages over other similar devices manufacture by standard process include low-cost easy integration VLSI circuits drive, communication, control. can be easily incorporated into arrays each individualized control sensing independent operation.