A Thin-Film Gas Sensor Fabricated on a Diaphragm on a Silicon Substrate
作者： Tsuyoshi Ogawa , Kazuhiro Hara
DOI: 10.1541/IEEJEISS1987.112.12_763
关键词: Thin film 、 Substrate (printing) 、 Materials science 、 Silicon 、 Diaphragm (mechanical device) 、 Composite material
摘要:
sci-hub.st 参考文章(2)
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