Study on a Gas Sensor with Low Power Consumption Using Microbridge Structure

Tadao Hiwatari, Kazuhiro Hara, NOx Sensor Using Multi-Layered Semiconducting Thin-Film (特集 環境ガスセンサ) The transactions of the Institute of Electrical Engineers of Japan.A. ,vol. 118, pp. 136- 140 ,(1998)

Zhenan Tang, Samuel K.H Fung, Darwin T.W Wong, Philip C.H Chan, Johnny K.O Sin, Peter W Cheung, An integrated gas sensor based on tin oxide thin-film and improved micro-hotplate Sensors and Actuators B-chemical. ,vol. 46, pp. 174- 179 ,(1998) , 10.1016/S0925-4005(98)00118-X

Vincenzo Guidi, Gian Carlo Cardinali, Leonello Dori, Guido Faglia, Matteo Ferroni, Giuliano Martinelli, Paolo Nelli, Giorgio Sberveglieri, Thin-film gas sensor implemented on a low-power-consumption micromachined silicon structure Sensors and Actuators B-chemical. ,vol. 49, pp. 88- 92 ,(1998) , 10.1016/S0925-4005(98)00039-2

H. M. Manasevit, W. I. Simpson, Single‐Crystal Silicon on a Sapphire Substrate Journal of Applied Physics. ,vol. 35, pp. 1349- 1351 ,(1964) , 10.1063/1.1713618

Kazuhiro Hara, Noriyuki Nishida, H2 sensors using Fe2O3-based thin film Sensors and Actuators B: Chemical. ,vol. 20, pp. 181- 186 ,(1994) , 10.1016/0925-4005(94)01181-8

R. T. Howe, Recent Advances in Surface Micromachining Ieej Transactions on Sensors and Micromachines. ,vol. 116, pp. 90- 97 ,(1996) , 10.1541/IEEJSMAS.116.90

Hidehisa Murayama, Tsuyoshi Ogura, Kazuhiro Hara, An Integrated Gas Sensor Fabricated on a Silicon Substrate Ieej Transactions on Sensors and Micromachines. ,vol. 118, pp. 602- 607 ,(1998) , 10.1541/IEEJSMAS.118.602

Tsuyoshi Ogawa, Kazuhiro Hara, A Thin-Film Gas Sensor Fabricated on a Diaphragm on a Silicon Substrate Ieej Transactions on Electronics, Information and Systems. ,vol. 112, pp. 763- 768 ,(1992) , 10.1541/IEEJEISS1987.112.12_763