An integrated gas sensor based on tin oxide thin-film and improved micro-hotplate
作者： Zhenan Tang , Samuel K.H Fung , Darwin T.W Wong , Philip C.H Chan , Johnny K.O Sin
DOI: 10.1016/S0925-4005(98)00118-X
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摘要: Abstract The fabrication and characterization of an integrated gas sensor based on tin oxide thin-film improved micro-hotplate (MHP) are presented in this paper. Tin thin-films sputtered onto the MHP from dioxide target or pure metal under different sputtering conditions. properties films analyzed by scanning electron microscopy (SEM) X-ray photoelectron spectroscopy (XPS). sensors characterized automated precision system. Sensors both dynamic static modes. In mode, a analyzer is used to extract out measurement chamber. replaced chromatography port.
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