Temperature-Programmed Gas-Sensing With Microhotplates: an Opportunity to Enhance Microelectronic Gas Sensor Metrology
作者： Jon Geist , Muhammad Afridi , Erik M. Secula , David G. Seiler , Rajinder P. Khosla
DOI: 10.1063/1.3251222
关键词:
摘要: … integration with a microprocessor to form a gassensor system. This die might be mounted on top of a microprocessor die and wire bonded to form an SIP. Alternatively, the same layout …
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