INTEGRATED CAPACITY CONVERTER

摘要: PURPOSE: To obtain an easily chargeable homogeneous electret structure having excellent charge holding property by arranging a fixed plate in movable section and providing first conductive layer which is separated from film interspace buried insulator. CONSTITUTION: A capacitive transducer 1 incorporates upper 2 electrodes 4, intermediate 6 second 8, lower 10 forms supporting for whole body composed of two plates on one side the rear chamber 12 other side. The to 14 with insulating spacers its peripheral section. separate opened space 16 between electrically insulates each other. has frame 18 carries 4 extended into 18. provided 30 32 layers 34 36 material separately electrode 8. along 2.