Electret capacitor microphone unit
作者： Tohru Yamaoka , Hiroshi Ogura
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摘要: An electret capacitor microphone unit (2) comprising a diaphragm (30) formed by mounting an electret-based silicon oxide film (7) on oscillatory electrode (5) while being covered with nitride films (8, 9) in order to enhance moisture resistance and heat resistance, fixed (6).
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