Two-stage valve suitable as high-flow high-pressure microvalve

摘要: A two-stage valve for controlling the flow of gas from a pressurized supply with an upper main body including cavity; lower at least one exhaust passage forming primary path through valve; pre-stressed diaphragm sandwiched between and bodies, pressure control capability in cavity. secondary exists body, terminating cavity body. first is installed to open close second allows environment. When closed, can be increased diaphragm. Raising lowering causes valve. The design its components lends itself constructing as microvalve using Micro-Electro-Mechanical Systems (MEMS) concepts.