High temperature micro-machined valve
作者： Richard P. White , Tak Kui Wang , Peisheng Sheng
DOI:
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摘要: Micro-valves that include a diaphragm capable of being positioned on valve seat or removed from the seat. The micro-valves also supports and cover restrict motion diaphragm, thereby reducing possibility cracking. made by anodically bonding to substrate diaphragm. Micro-injectors micro-valves. Also, methods making micro-injectors.
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