ETCHING POLYIMIDE WITH A NONEQUILIBRIUM ATMOSPHERIC-PRESSURE PLASMA JET
作者： J. Y. Jeong , S. E. Babayan , A. Schütze , V. J. Tu , J. Park
DOI: 10.1116/1.581999
关键词: Torr 、 Etching (microfabrication) 、 Electrode 、 Langmuir probe 、 Atmospheric-pressure plasma 、 Partial pressure 、 Oxygen 、 Analytical chemistry 、 Chemistry 、 Plasma
摘要: … a new plasma source, the atmospheric-pressure plasma jet, … is similar to a low-pressure gas discharge. With increasing … The breakdown voltage of the atmospheric-pressure plasma …
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