Transparent conductive film and method for its production, and sputtering target
作者： Katsuaki Aikawa , Akira Mitsui , Yasuo Hayashi , Masao Higeta , Kazuo Sato
DOI:
关键词: Chemical engineering 、 Sputtering 、 Zinc 、 Transparent conducting film 、 Silicon 、 Materials science 、 Electrical conductor 、 Gallium
摘要: A transparent conductive film of a zinc oxide type containing gallium and silicon, which contains silicon in an amount from 0.01 to 1.5 mol % terms SiO 2 .
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