Transparent zinc oxide electrode having a graded oxygen content

摘要: A method of reactively sputtering from a metallic zinc target transparent conductive oxide electrode in silicon photo diode device and the resultant product, such as solar cell. The deposited on substrate at least two steps. oxygen partial pressure is reduced first step to produce an oxygen-deficient ZnO layer, which highly has textured surface, increased second more stoichiometric ZnO, refractive index closely matched overlying device. layer substantially thinner than so surface texture transferred across it overall sheet resistance stack structure reduced.