Vacuum processing apparatus and assembly method thereof
作者： Koichi Shimada
DOI:
关键词: Exhaust pipe 、 Flange 、 Structural engineering 、 Port (circuit theory) 、 Mechanical engineering 、 Materials science
摘要: The disclosure provides an assembly method of a vacuum processing apparatus having reaction vessel and exhaust port that are made quartz airtightly connected to each other, in order prevent breakage the vessel. includes (a) mounting attachment member on one end portion vessel, (b) connecting fixing at least flange pipe port, (c) including fixed by using members after (b), (d) support (a), (e) different from lower position than completing (d).
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