On the relevance of large scale pulsed-laser deposition: Evidence of structural heterogeneities in ZnO thin films

摘要: Pulsed-laser deposition is known as a well-suited method for growing thin films of oxide compounds presenting wide range functional properties. A limitation this industrial process the very anisotropic expansion dynamics plasma plume, which induces difficulties to grow on large scale with homogeneous thickness and composition. The specific aspect crystalline or orientation uniformity has not been investigated, despite its important role In work, parameters texture zinc are studied function position respect central axis plume. We demonstrate existence non-uniformities in films. stoichiometry, lattice parameter, distribution crystallites orientations drastically depend plume axis, i.e., oblique incidence ablated species. origin these non-uniformities, particular, unexpected tilted ZnO c-axis may be attributed combined effects ratio between oxygen fluxes reaching surface film.