作者: Jung-Chuan Chou , Da-Gong Wu , Shi-Chang Tseng , Chien-Cheng Chen , Guan-Chen Ye
DOI: 10.1109/JSEN.2012.2234552
关键词: Polydimethylsiloxane 、 Microfluidics 、 Pressure drop 、 Reference electrode 、 Biosensor 、 Materials science 、 Fluidics 、 Nanotechnology 、 Electrode 、 Thin film
摘要: In this paper, the RuO2 sensing film is fabricated by sputtering system, and miniature reference electrode screen printed technique for integrating thin in array flexible sensor. Furthermore, computer numerical control used to fabricate stainless model of fluidic channel, polydimethylsiloxane as material channel. Finally, sensor integrated channel form potentiometric biosensor fluidic. The property analyzed differential pressure meter measure drop discuss effect related factors. based pH can obtain a higher value at 61.3 mV/pH with super-Nernstian response. Besides, due silver's excellent stability conductivity, fix silver polyethylene terephthalate substrate. sensitivities 61.31, 59.65, 56.45 flow rates 10, 20, 30 ml/min, respectively, are obtained. experimental result demonstrates that be applied detect concentration.