Structure and properties of CrSiCN coatings deposited by pulsed dc magnetron sputtering for wear and erosion protection

摘要: Abstract CrSiCN nanocomposite coatings were deposited by sputtering a chromium (Cr) target in gas mixture containing argon, nitrogen, and trimethylsilane (TMS) using middle frequency pulsed dc magnetron (PDCMS). The with different silicon (Si) carbon (C) contents obtained varying the TMS flow rate from 0 to 12 sccm. Uniform depositions high deposition rates (8–10 μm per hour) have been achieved. microstructure of was studied means X-ray diffraction, photoelectron spectroscopy, scanning electron microscopy transmission microscopy. lattice parameter first increased addition small amount Si (1.7 at.%) C (5 at.%) formation cubic solid solution, then decreased further increase contents. coating changed columnar grains interconnected fine grains, finally structure as increased, which Cr(Si, C)N nanocrystallites surrounded an amorphous matrix consisting SiC x , C, SiN CN . volume fraction phases increased. mechanical properties, dry sliding wear resistance, particle erosion (SPE) resistance analyzed nanoindentation, ball-on-disc test, air jet sand respectively. As compared baseline CrN coating, (1.7–5 at.%) (5–9.6 at.%) effectively improved hardness H/E ⁎ H 3 /E ⁎2 coatings. strengthening mechanisms include solution hardening grain boundaries via thin layer. properties contributed excellent SPE against alumina at both 30° 90° incident angles. However, respectively above 10.3 at.% 16 at.%, all decreased.