Evaluation of crack resistance of CrSiCN coatings as a function of Si concentration via nanoindentation
作者： Qianzhi Wang , Zhiwei Wu , Fei Zhou , Hu Huang , Keiichiro Niitsu
DOI: 10.1016/J.SURFCOAT.2015.04.001
关键词: Coating 、 Materials science 、 Microstructure 、 Composite material 、 Solid solution 、 Compressive strength 、 Elasticity (economics) 、 Nanoindentation 、 Amorphous solid 、 Raman spectroscopy
摘要: A series of CrSiCN coatings with various Si concentrations were deposited on Si(100) wafers, and the influence content microstructure, mechanical property crack resistance was investigated by XRD, Raman spectroscopy nanoindentation. After introducing (CH3)3SiH into precursor from 5 sccm to 30 sccm, concentration increased 0.97 at% 7.00 gradually increasing formation amorphous SiCx SiNx. Under low (0.97~3.40 at%) condition, solid solution effect nc-Cr(C,N)/a-SiNx(a-SiCx) architecture caused an increase in hardness 18.1 GPa 21.3 GPa. In contrast, at high (5.35~7.00 at%), larger grain separation, which resulted a-SiNx(a-SiCx), led a drop range 13.0 ~ 13.6 decrease compressive stress 4.74 2.78 As result, superior elasticity prevented (Si<3.40 radial crack, whereas (Si?3.40 confronted. However, after unloading, unbalance (4.74 4.83 GPa) CrCN (0.97 initiated cracks parallel indenter edge. On account favorable H/E, H3/E2 stress, coating 2.05 presented best resistance.
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