Progress in thin film formation by laser assisted molecular beam deposition (LAMBD)
作者： Robert L. DeLeon , Mukesh P. Joshi , Eric F. Rexer , Paras N. Prasad , James F. Garvey
DOI: 10.1016/S0169-4332(97)00650-8
关键词: Materials science 、 Thin film 、 Polymer 、 Pulsed laser deposition 、 Analytical chemistry 、 Optoelectronics 、 Silicon 、 Substrate (electronics) 、 Raman scattering 、 Fourier transform infrared spectroscopy 、 Aluminium oxides
摘要: Abstract Laser assisted molecular beam deposition (LAMBD) is a pulsed laser ablation technique which utilizes train of gas pulses to precisely control the chemistry and transport species be deposited on substrate. The LAMBD has been used grow films variety substrates ablate target materials including: metals, metal oxides, halides, Si, C SiC. In addition, more complex composite such as Cu embedded polymers, YBa2Cu3O7−x organic doped TiO2 Al2O3 have also produced. These analyzed by Raman scattering, SEM, EDX, FTIR, ESCA, NMR, mass spectrometry surface profile measurements determine film structure composition. Recent progress source characterization emission spectroscopy new design will presented. results demonstrate potential using sources means depositing high quality single multiple component films.
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William R. Bozman, Charles H. Corliss, Experimental transition probabilities for spectral lines of seventy elements U. S. Government Printing Office. ,(1962)
Charles H Corliss, William R Bozman, Experimental Transition Probabilities for Spectral Lines of Seventy Elements: Derived from the NBS Tables of Spectral-line Intensities NBS Monograph. ,(1962) , 10.6028/NBS.MONO.53
Graham K. Hubler, Douglas B. Chrisey, Pulsed laser deposition of thin films Pulsed Laser Deposition of Thin Films. pp. 1675- 1689 ,(2003) , 10.1201/NOE0750309608-90
Shigeru Otsubo, Toshihiro Maeda, Toshiharu Minamikawa, Yasuto Yonezawa, Akiharu Morimoto, Tatsuo Shimizu, Preparation of Pb(Zn0.52Ti0.48)O3Films by Laser Ablation Japanese Journal of Applied Physics. ,vol. 29, ,(1990) , 10.1143/JJAP.29.L133
Upvan Narang, Jeffrey D. Jordan, Frank V. Bright, Paras N. Prasad, PROBING THE CYBOTACTIC REGION OF PRODAN IN TETRAMETHYL ORTHOSILICATE-DERIVED SOL-GELS The Journal of Physical Chemistry. ,vol. 98, pp. 8101- 8107 ,(1994) , 10.1021/J100084A029
Andrew S. Grove, Physics and technology of semiconductor devices Wiley. ,(1967)
Upvan Narang, Frank V. Bright, Paras N. Prasad, Characterization of Rhodamine 6G-Doped Thin Sol-Gel Films Applied Spectroscopy. ,vol. 47, pp. 229- 234 ,(1993) , 10.1366/0003702934048253
G. Koren, A. Gupta, R. J. Baseman, M. I. Lutwyche, R. B. Laibowitz, Laser wavelength dependent properties of YBa2Cu3O7−δthin films deposited by laser ablation Applied Physics Letters. ,vol. 55, pp. 2450- 2452 ,(1989) , 10.1063/1.101999
Robert Krumlau, George A. Marzluf, Characterization of the sequence complexity and organization of the Neurospora crassa genome. Biochemistry. ,vol. 18, pp. 3705- 3713 ,(1979) , 10.1021/BI00584A011
W. M. K. P. Wijekoon, J. J. Stry, P. N. Prasad, J. F. Garvey, Formation of polymerized thin films during laser assisted molecular beam deposition of Cu and acetylene/acetone Langmuir. ,vol. 11, pp. 27- 29 ,(1995) , 10.1021/LA00001A008