Image Processing of Defocus Series TEM Images for Extracting Reliable Phase Information

作者: Kyung Song , Sang Ho Oh , Jong Kyu Kim , Ga-Young Shin

DOI:

关键词: Imaging conditionHolographyOpticsPhase retrievalDiodeGeometric phaseLattice (order)Materials scienceImage processingHigh-resolution transmission electron microscopy

摘要: We discuss the experimental procedure for extract- ing reliable phase information from a defocus series of transmis- sion electron microscopy (TEM) dark-field images using trans- port intensity equation (TIE). Taking InGaN/GaN multi-quan- tum well light-emitting diode as model system, various factors affecting final result reconstructed such TEM sam- ple preparation, imaging condition, image alignment, correction values and use high frequency pass filter are evaluated. The obtained wave function was con- verted to geometric corresponding lattice planes, which then used two-dimensional mapping strain following inline holography (DIH) routine. map by DIH after optimized processing is compared with that analysis resolution (HRTEM) image, manifesting yields more accurate than HRTEM-based GPA. ( 송경 , 신가영, 김종규, 오상호: 정확한 위상정보를 얻기 위한 탈초점 영상들의 이미지 처리기법)

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