Characterization of interface states at Ni/n-Si Schottky barriers fromI –V characteristics

作者: P. P. Sahay , R. S. Srivastava

DOI: 10.1002/CRAT.2170251218

关键词: MetalNickelWaferSchottky diodeEpitaxyBand gapVacuum depositionTorrAnalytical chemistryChemistryGeneral Materials ScienceGeneral chemistryCondensed matter physics

摘要: Experiments were performed on Ni/n-Si(111) Schottky diodes fabricated by the thermal vacuum deposition of nickel n/n+ Si epitaxial wafer at ˜ 10−5 torr pressure. The non-equilibrium occupation functions interface states studied using Shockley-Read-Hall (SRH) theory and considering charge exchange between metal states. Interface density was determined from (I - V) characteristics metal-interfacial layer-semiconductor (MIS) structure. found to be in range 1012 eV−1 cm−2 with a broad peak band gap about 0.554 eV below conduction edge.

参考文章(10)
D. E. Eastman, J. L. Freeouf, Relation of Schottky Barriers to Empty Surface States on III-V Semiconductors Physical Review Letters. ,vol. 34, pp. 1624- 1627 ,(1975) , 10.1103/PHYSREVLETT.34.1624
Ching‐Yuan Wu, Interfacial layer‐thermionic‐diffusion theory for the Schottky barrier diode Journal of Applied Physics. ,vol. 53, pp. 5947- 5950 ,(1982) , 10.1063/1.331384
J. E. Rowe, S. B. Christman, G. Margaritondo, Metal-Induced Surface States during Schottky-Barrier Formation on Si, Ge, and GaAs Physical Review Letters. ,vol. 35, pp. 1471- 1475 ,(1975) , 10.1103/PHYSREVLETT.35.1471
S. Kar, W.E. Dahlke, Potentials and direct current in Si-(20 to 40 Å)SiO2-metal structures Solid-state Electronics. ,vol. 15, pp. 869- 875 ,(1972) , 10.1016/0038-1101(72)90023-8
L.B. Freeman, W.E. Dahlke, Theory of tunneling into interface states Solid-State Electronics. ,vol. 13, pp. 1483- 1503 ,(1970) , 10.1016/0038-1101(70)90084-5
John Bardeen, Surface States and Rectification at a Metal Semi-Conductor Contact Physical Review. ,vol. 71, pp. 717- 727 ,(1947) , 10.1103/PHYSREV.71.717
D J Coe, E H Rhoderick, Silicide formation in Ni-Si Schottky barrier diodes Journal of Physics D. ,vol. 9, pp. 965- 972 ,(1976) , 10.1088/0022-3727/9/6/009
Paul E. Gregory, W. E. Spicer, Photoemission studies of the GaAs-Cs interface Physical Review B. ,vol. 12, pp. 2370- 2381 ,(1975) , 10.1103/PHYSREVB.12.2370
A. Deneuville, Characterization of the interface states at a Ag/Si interface from capacitance measurements Journal of Applied Physics. ,vol. 45, pp. 3079- 3084 ,(1974) , 10.1063/1.1663727
C. Barret, A. Vapaille, Determination of the density and the relaxation time of silicon-metal interfacial states Solid-State Electronics. ,vol. 18, pp. 25- 27 ,(1975) , 10.1016/0038-1101(75)90068-4