In-Situ Processing and Theoretical Model for Deposition of Laser Ablated High-Tc YBa2Cu3O7 Superconducting Thin Films

摘要: We have theoretically analyzed and developed a model for the interaction of pulsed laser beams with bulk YBa2Cu3O7 targets resulting in evaporation, plasma formation deposition thin films. In this model, generated is treated as an ideal gas initially at high temperature pressure, then allowed to expand vacuum. The three-dimensional isoentropic expansion gives rise spatial thickness composition variations observed solution hydrodynamic equations show that characteristics are dependent on dimensions plasma, mass species. effect pulse energy density other parameters also analyzed. Some theoretical results compared experimental values obtained by excimer evaporation YBa2Cu307 targets. discuss some superconducting microstructural in-situ processed epitaxial films fabricated substrate temperatures between 500–650°C XeC1 irradiation oxygen ambient 200 millitorr. An application positively biased ring target was found reduce 500°C, although quality growth decreased significantly below 500°C. Excellent single crystal were (100) SrTiO3 LaA1O3 substrates 550–650°C. nearly defect free minimum ion channeling yields 3% 3.5% LaA103 SrTiO3, respectively. Superconducting YSZ substrates, epitaxial, possessed much larger concentrations result lattice mismatch. Very critical current densities (at 77K zero magnetic field) exceeding 6.0 × 106 Amps/cm2 which represents best quoted literature. silver doping these discussed.