Microstructural and compositional variations in laser‐deposited superconducting thin films
作者： R. K. Singh , N. Biunno , J. Narayan
DOI: 10.1063/1.100653
关键词:
摘要: We have investigated thickness and composition variations in laser‐deposited superconducting thin films their effects on the microstructure development after subsequent annealing to recover properties. Superconducting were deposited magnesium oxide substrates using a pulsed excimer laser (λ=308 nm, τ=45×10−9 s). These annealed at about 900 °C helium oxygen atmospheres followed by slow cooling room temperature. The forward directed nature of laser‐induced deposition process controlling spatial variation film was examined gas dynamics generated plasma. compositional as function distance determined Rutherford backscattering spectrometry. Correlation presence different phases with average done transmission electron microscopy combined x‐ray microanalysis techniques. slight enrichment yttrium result...
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