Model to explain the behavior of 2DEG mobility with respect to charge density in N-polar and Ga-polar AlGaN-GaN heterostructures

作者: Elaheh Ahmadi , Stacia Keller , Umesh K. Mishra

DOI: 10.1063/1.4962321

关键词: NanotechnologyInduced high electron mobility transistorTransistorOptoelectronicsCharge densityHeterojunctionScatteringWide-bandgap semiconductorHigh-electron-mobility transistorMaterials scienceElectron mobility

摘要: There are three possible ways of reducing the charge density (ns) in the N-polar high electron mobility transistors (HEMT) structures, by decreasing the channel thickness, applying reverse gate bias, or modifying the back-barrier. Understanding the behavior of 2DEG mobility as a function of ns is essential to design high performance HEMT devices. Experimental data show that in the N-polar HEMT structures, the 2DEG mobility reduces as the ns decreases by applying reverse gate bias or decreasing channel thickness, whereas …

参考文章(29)
William M. Waller, Serge Karboyan, Michael J. Uren, Kean Boon Lee, Peter A. Houston, David J. Wallis, Ivor Guiney, Colin J. Humphreys, Martin Kuball, Interface State Artefact in Long Gate-Length AlGaN/GaN HEMTs IEEE Transactions on Electron Devices. ,vol. 62, pp. 2464- 2469 ,(2015) , 10.1109/TED.2015.2444911
Haoran Li, Stacia Keller, Silvia H Chan, Jing Lu, Steven P DenBaars, Umesh K Mishra, Unintentional gallium incorporation in AlN and its impact on the electrical properties of GaN/AlN and GaN/AlN/AlGaN heterostructures Semiconductor Science and Technology. ,vol. 30, pp. 055015- ,(2015) , 10.1088/0268-1242/30/5/055015
B. L. Gelmont, M. Shur, M. Stroscio, Polar optical-phonon scattering in three- and two-dimensional electron gases Journal of Applied Physics. ,vol. 77, pp. 657- 660 ,(1995) , 10.1063/1.359051
D Zanato, S Gokden, N Balkan, B K Ridley, W J Schaff, The effect of interface-roughness and dislocation scattering on low temperature mobility of 2D electron gas in GaN/AlGaN Semiconductor Science and Technology. ,vol. 19, pp. 427- 432 ,(2004) , 10.1088/0268-1242/19/3/024
V. I. Pipa, N. Z. Vagidov, V. V. Mitin, M. Stroscio, Electron-acoustic phonon interaction in semiconductor nanostructures: Role of deformation variation of electron effective mass Physical Review B. ,vol. 64, pp. 235322- ,(2001) , 10.1103/PHYSREVB.64.235322
R. Gaska, M. S. Shur, A. D. Bykhovski, A. O. Orlov, G. L. Snider, Electron mobility in modulation-doped AlGaN-GaN heterostructures Applied Physics Letters. ,vol. 74, pp. 287- 289 ,(1999) , 10.1063/1.123001
Yifei Zhang, I. P. Smorchkova, C. R. Elsass, Stacia Keller, James P. Ibbetson, Steven Denbaars, Umesh K. Mishra, Jasprit Singh, Charge control and mobility in AlGaN/GaN transistors: Experimental and theoretical studies Journal of Applied Physics. ,vol. 87, pp. 7981- 7987 ,(2000) , 10.1063/1.373483
Nils G. Weimann, Lester F. Eastman, Dharanipal Doppalapudi, Hock M. Ng, Theodore D. Moustakas, Scattering of electrons at threading dislocations in GaN Journal of Applied Physics. ,vol. 83, pp. 3656- 3659 ,(1998) , 10.1063/1.366585
E. J. Miller, X. Z. Dang, H. H. Wieder, P. M. Asbeck, E. T. Yu, G. J. Sullivan, J. M. Redwing, Trap characterization by gate-drain conductance and capacitance dispersion studies of an AlGaN/GaN heterostructure field-effect transistor Journal of Applied Physics. ,vol. 87, pp. 8070- 8073 ,(2000) , 10.1063/1.373499
Jing Lu, Xun Zheng, Matthew Guidry, Dan Denninghoff, Elahe Ahmadi, Shalini Lal, Stacia Keller, Steven P. DenBaars, Umesh K. Mishra, Engineering the (In, Al, Ga)N back-barrier to achieve high channel-conductivity for extremely scaled channel-thicknesses in N-polar GaN high-electron-mobility-transistors Applied Physics Letters. ,vol. 104, pp. 092107- ,(2014) , 10.1063/1.4867508