Step Coverage in ALD
作者： Sovan Kumar Panda , Hyunjung Shin
DOI: 10.1002/9783527639915.CH2
关键词: Atomic layer deposition 、 Optoelectronics 、 Sticking probability 、 Nanotechnology 、 Materials science 、 Aspect ratio
摘要:
sci-hub.se 参考文章(40)
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