Influence of the bilayer thickness on the optical properties of Al2O3-Y2O3 dielectric nanolaminate films grown by thermal atomic layer deposition

摘要: Abstract This work focuses on the study of optical properties nanolaminate films Al2O3-Y2O3 bilayers. Nanolaminates were grown by means thermal atomic layer deposition (ALD). The multilayer thickness, refractive index and bandgap studied via spectroscopic ellipsometry. Ellipsometric data revealed an increase from 1.9 to 2.2 at 190 nm wavelength when bilayer thickness varies between 4 10 nm. These results demonstrate that can be modulated varying thickness. Optical values, obtained Wemple DiDomenico model, indicate decrease leads (ΔEg = 0.8 eV), as well Eg modulation a function show this material could exploited for designing multilayered coatings suitable nanoscale optoelectronic devices.