Enhanced programming and erasing speeds in p-channel charge-trapping flash transistor devices with SiGe channel

作者: Li-Jung Liu , Kuei-Shu Chang-Liao , Yi-Chuen Jian , Tien-Ko Wang , Ming-Jinn Tsai

DOI: 10.1109/ISDRS.2011.6135247

关键词: OptoelectronicsTrappingFlash memoryCharge (physics)Charge trap flashCommunication channelReliability (semiconductor)TransistorFlash (photography)Materials scienceElectrical engineering

摘要: P-channel charge-trapping flash transistor devices with different Ge contents in SiGe channel and thicknesses of Si 0.8 0.2 are investigated this work. Both programming erasing speeds significantly improved by employing comparison those Si-channel. Moreover, satisfactory retention endurance characteristics for device also achieved, which indicates the out-diffusion atoms from does not affect reliability properties memory devices.

参考文章(4)
Hsiang-Yueh Lai, Kuei-Shu Chang-Liao, Tien-Ko Wang, Ping-Kun Wang, Chin-Lung Cheng, Performance improvement of flash memories with HfOxNy∕SiO2 stack tunnel dielectrics Journal of Vacuum Science & Technology B. ,vol. 24, pp. 1683- 1688 ,(2006) , 10.1116/1.2207153
Chung-Hao Fu, Kuei-Shu Chang-Liao, Kuen-Hong Tsai, Tien-Ko Wang, Yao-Jen Lee, Effects of Ge content in SiGe channel on electrical characteristics of high-k gated MOS device international sige technology and device meeting. ,vol. 53, pp. 888- 891 ,(2009) , 10.1016/J.SSE.2009.04.022
C.-C. Wang, K.-S. Chang-Liao, C.-Y. Lu, T.-K. Wang, Enhanced Band-to-Band-Tunneling-Induced Hot-Electron Injection in p-Channel Flash by Band-gap Offset Modification IEEE Electron Device Letters. ,vol. 27, pp. 749- 751 ,(2006) , 10.1109/LED.2006.880642
Ping-Hung Tsai, Kuei-Shu Chang-Liao, Te-Chiang Liu, Tien-Ko Wang, Pei-Jer Tzeng, Cha-Hsin Lin, L.S. Lee, Ming-Jinn Tsai, Charge-Trapping-Type Flash Memory Device With Stacked High- $k$ Charge-Trapping Layer IEEE Electron Device Letters. ,vol. 30, pp. 775- 777 ,(2009) , 10.1109/LED.2009.2022287