Micromachined aperture probe tip for multifunctional scanning probe microscopy
作者： W. Noell , M. Abraham , K. Mayr , A. Ruf , J. Barenz
DOI: 10.1063/1.118540
关键词: Scanning probe microscopy 、 Scanning capacitance microscopy 、 Scanning gate microscopy 、 Scanning confocal electron microscopy 、 Atomic force acoustic microscopy 、 Materials science 、 Near-field scanning optical microscope 、 Scanning ion-conductance microscopy 、 Vibrational analysis with scanning probe microscopy 、 Optics
摘要: A novel micromachined aperture tip has been developed for near-field scanning optical microscopy. The advantages of the new probe over commonly used fiber probes are illustrated. is fabricated in a reliable batch process which potential implementation micromachining processes microscopy sensors and therefore leads to types multifunctional probes. For evaluation purposes, was attached an by microassembly setup subsequently installed microscope. First measurements topographical patterns demonstrate proper performance hybrid probe.
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