Fabrication of Silicon Microprobes for Optical Near-Field Applications

摘要: Preface INTRODUCTION Introduction Structure of the Book References OF NEAR-FIELD OPTICS Far-Field Light and Diffraction Effect Concept Near-Field Optics Optical Microscopy Instrumentation Imaging Techniques for Control Tip-Sample Distance Tapered Fiber Based Probes Disadvantages Solutions with Silicon Micromachined SILICON MICROMACHINING TECHNOLOGY Lithography Thermal Oxidation Metallization Etching Oxide Anodic Bonding Packaging FABRICATION MICROPROBES FOR OPTICAL APPLICATIONS Overview Design Principle Fabrication Process Detail Results Discussion EVALUATION THE MICROFABRICATED PROBES Throughput Measurement Spatial Distribution at Fabricated Aperture Polarization Behaviors Static Dynamic Properties Cantilevers NOVEL LOCALLY ENHANCING LIGHT AND OTHER Coaxial Apertured Probe a Single Carbon Nano Tube an Embedded Ag Particle Characterization Hybrid Cantilever Applications Metallic Contacts in Nanoscale Size Profiler Recording Array Initial Electron Field Emission Devices USING FINITE DIFFERENCE TIME DOMAIN METHOD FDTD modeling optical near-field simulation SUB-WAVELENGTH IMAGING WITH FABRICATED Setups LITHOGRAPHY Slits Patterns Transfer Grid Pattern Using Polarized Conclusion RECORDING APERTURE ARRAY VCSEL/NSOM First Result FUTURE ASPECT CONCLUSIONS Future Aspect Work Subject Index