High throughput aperture near-field scanning optical microscopy
作者： Phan Ngoc Minh , Takahito Ono , Masayoshi Esashi
DOI: 10.1063/1.1304867
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摘要: This article presents a simple measurement setup for characterization of combined near-field scanning optical and atomic force microscopy (NSOM/AFM) using an aperture Si based probe. A technological approach has been found the fabrication miniature at apex SiO2 tip on cantilever NSOM “low temperature oxidation selective etching” (LOSE) technique. The transmission efficiency (throughput) fabricated probe was measured to be about 10−2 when size approximately 100 nm, which is several orders magnitude higher than that conventional fibers also other published throughput micromachined tips due large curvature angle tip. An extension LOSE technique with tiny having metal nanowire center multipurpose presented. Using proposed probe, cor...
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