Integrated microelectromechanical system devices and methods for making the same
作者： John E. Rogers
DOI:
关键词: Substrate (printing) 、 Conductor 、 Electrical engineering 、 Filter (video) 、 Microelectromechanical systems 、 Engineering
摘要: Integrated Microelectromechanical System (“MEMS”) devices and methods for making the same. The integrated MEMS device comprises a substrate ( 200 ) with first electronic circuitry 206 formed thereon, as well filter 100 ). has transition portion 118 configured to (a) electrically connect second (b) suspend over such that gas gap exists between device. three dimensional hollow ground structure 120 in which an elongate center conductor 122 is suspended. RF also at least two adjacent elements 102/110 are isolated from each other via of portion, placed close proximity other.
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