Tunable-trimmable micro electro mechanical system (MEMS) capacitor

摘要: A high Q MEMS capacitor that can be continuously tuned with a large tuning ratio or reversibly trimmed using an electrostatic force. The tunable has master/slave structure in which control voltage is applied to the master (control) set capacitance of slave (signal) RF signal via suspended mechanical coupler. master-slave reduces error by reducing capacitor's surface area and increasing its spring constant, may eliminate need for discrete blocking inductors electrically isolating capacitors. trimmable provides actuator selectively engages stopper teeth on fix capacitance.