MEMS oscillator with temperature sensitive MEMS capacitances
作者： Yoshifumi Yoshida , Fumio Kimura
DOI:
关键词:
摘要: Provided is an oscillator including: a MEMS resonator for mechanically vibrating; output circuit oscillating at resonance frequency of the to oscillation signal; and capacitor changing capacitance thereof caused by change in distance between anode electrode cathode beam according environmental temperature.
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