Micromechanical resonator device

摘要: A micromechanical resonator device is disclosed that utilizes competition between the thermal dependencies of geometrically tailored stresses and Young's modulus to: (1) reduce temperature coefficient (TCf) resonance frequencies without any additional power consumption; (2) introduce a zero TCf at which subsequent oven-controlled resonators may be biased. key feature in this design involves strategic sizing geometries its support structure to harness expansion coefficients oppose cancel those variation. This transforms original monotonically decreasing frequency versus curve an S-shaped (or linear one with much smaller slope), overall excursion over given range, points zero. strategy attaining needed stability for reference oscillator applications portable wireless communications RF channel-select filter banks. In addition, cases where response need not nulled, but rather must satisfy shape, technique can also used tailor specific curve.