MEMS SYSTEM AND METHOD FOR A MEMS SENSOR

作者: Wiesbauer Andreas , Mechnig Stephan , Hufschmitt Joseph , Jenkner Christian , Kollias Athanasios

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摘要: An embodiment comprises a method of performing measurement using microelectromechanical system (MEMS) device which includes plurality MEMS sensors having different resonant frequencies. The applying an excitation signal to first port the such that each is stimulated by signal. further measuring at second device, and determining measured value based on

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