Apparatus, methods, and systems to detect an analyte based on changes in a resonant frequency of a spring element

作者: Aaron Knobloch , Stacey Goodwin , Walter Cicha , Anis Zribi , Patrick Malenfant

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摘要: According to some embodiments, a Microelectromechanical System (MEMS) sensor includes sensing material on spring element. The may also include detector adapted determine resonant frequency associated with the element, wherein changes upon exposure of an analyte.

参考文章(32)
Christoph Hagleitner, Oliver Brand, Dirk Lange, Sensor apparatus and cantilever for it ,(2001)
Steinar Hauan, Todd M Przybycien, Kaigham J Gabriel, John Neumann, Michael Bartkovsky, MEMS membrane based sensor ,(2003)
Richard Mlcak, Dharanipal Doppalapudi, Harry L. Tuller, Micromechanical piezoelectric device ,(2002)