MEMS membrane based sensor
作者： Steinar Hauan , Todd M Przybycien , Kaigham J Gabriel , John Neumann , Michael Bartkovsky
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摘要: A micro-electro-mechanical system (MEMS) device is described having a membrane which can be induced to resonate and the frequency of its resonance monitored. Chemical moieties attached membrane, these selected such that they have an affinity for molecules interest, especially biological interest. When interest bind increase mass thereby change membrane's resonance. By monitoring one obtain indication presence in some circumstances approximate concentration molecules. In addition, several types affinities different placed on way sensor detect distinguish ones may present absent.
google.nl 参考文章(16)
Huikai Xie, Xu Zhu, Kaigham Gabriel, Multiple membrane structure and method of manufacture ,(2002)
Thomas H. Baum, Frank DiMeo, Micro-machined thin film sensor arrays for the detection of H2 containing gases, and method of making and using the same ,(2001)
Leoncio T. Ang, Charles Robert Cook, Strengthening a silicon micromachined mass air flow sensor in the region of its hot element ,(1991)
Peter Hsieh, Rafael Reif, Brian Cunningham, Dc Magnetron Reactive Sputtering of Low Stress Ain Piezoelectric Thin Films for Mems Application MRS Proceedings. ,vol. 546, pp. 165- 170 ,(1998) , 10.1557/PROC-546-165
Deborah J. Kirby, Jennifer J. Zinck, Thin film metal hydride hydrogen sensor ,(2000)
Vatche Vorperian, Roman C. Gutierrez, Tony K. Tang, William J. Kaiser, Kirill Shcheglov, Jaroslava Wilcox, Christopher B. Stell, High resolution and large dynamic range resonant pressure sensor based on Q-factor measurement ,(1998)
S.W. Wenzel, R.M. White, A multisensor employing an ultrasonic Lamb-wave oscillator IEEE Transactions on Electron Devices. ,vol. 35, pp. 735- 743 ,(1988) , 10.1109/16.2525
P.W. Walton, M.R. O'Flaherty, M.E. Butler, P. Compton, Gravimetric biosensors based on acoustic waves in thin polymer films Biosensors and Bioelectronics. ,vol. 8, pp. 401- 407 ,(1993) , 10.1016/0956-5663(93)80024-J
Alison J. Clark, Lorne A. Whitehead, Charles A. Haynes, Andrzej Kotlicki, Novel resonant-frequency sensor to detect the kinetics of protein adsorption Review of Scientific Instruments. ,vol. 73, pp. 4339- 4346 ,(2002) , 10.1063/1.1520731
E. Defaÿ, C. Millon, C. Malhaire, D. Barbier, PZT thin films integration for the realisation of a high sensitivity pressure microsensor based on a vibrating membrane Sensors and Actuators A-physical. ,vol. 99, pp. 64- 67 ,(2002) , 10.1016/S0924-4247(01)00883-4