Strengthening a silicon micromachined mass air flow sensor in the region of its hot element

摘要: A matrix consisting of glass microspheres and cured epoxy is disposed in a cavity at the backside silicon diaphragm to strengthen without any significant adverse influence on ability sensor quickly accurately respond changes mass air flow. The strengthening which imparted device enables it comply with certain specifications defining extent must be capable withstanding damage from air-entrained dust particles acting frontside diaphragm.