Mems based current sensor using magnetic-to-mechanical conversion and reference components
作者： Laura Jean Meyer , Christopher James Kapusta , Ertugrul Berkcan , Anis Zribi , Glenn Scott Claydon
DOI:
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摘要: A micro-electromechanical system (MEMS) current sensor is described as including a first conductor, magnetic field shaping component for produced by in the and MEMS-based sensing magneto-MEMS shaped and, response thereto, providing an indication of conductor. method using MEMS also with having circuit,
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