作者: Kenta Kotani , Iwao Kawayama , Masayoshi Tonouchi
DOI: 10.1143/JJAP.41.6790
关键词: Pulsed laser deposition 、 Thin film 、 Dielectric 、 Quality (physics) 、 Electrode 、 Dissipation factor 、 Dielectric response 、 Composite material 、 Materials science
摘要: … Prior to the characterization of the SBT thin film, the dielectric constants and dissipation factors of 0.5-mm-thick MgO and STO wafers are estimated using the IDEs. They are constant in …