A study of the mechanical reliability of a MEMS microphone
作者： Wenxiao Fang , Qinwen Huang
DOI: 10.1109/IPFA.2013.6599261
关键词: Finite element method 、 Engineering 、 Microphone 、 Acoustics 、 Mems microphone 、 Diaphragm (acoustics) 、 Structural engineering 、 Microelectromechanical systems 、 Mechanical reliability 、 Plane (geometry) 、 Acceleration
摘要: This paper describes a failure analysis on commercial MEMS microphone after test according to the standard of Mil-Std-883. With help and finite element simulation, we find that studied part can survive stress limit above 20000g normal diaphragm plane. Under constant acceleration high 30000g, breaks devices fail.
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