Electro‐optic effects of (Pb, La)(Zr, Ti)O3thin films prepared by rf planar magnetron sputtering
作者： Hideaki Adachi , Takao Kawaguchi , Kentaro Setsune , Kenzo Ohji , Kiyotaka Wasa
DOI: 10.1063/1.93795
关键词: Sputtering 、 Crystal structure 、 Lanthanum compounds 、 Integrated circuit 、 Optoelectronics 、 Sapphire 、 Epitaxy 、 Thin film 、 Planar magnetron 、 Materials science 、 Physics and Astronomy (miscellaneous)
摘要: Epitaxial (Pb, La)(Zr, Ti)O 3 thin films were grown successfully on (0001) sapphire substrates at below 600 C. High quadratic electro‐optic coefficient of 0.8×10 − 1 6 (m/V) 2 was also …
scitation.org
harvard.edu
aip.org
sci-hub.se 参考文章(7)
C. B. Sawyer, C. H. Tower, Rochelle Salt as a Dielectric Physical Review. ,vol. 35, pp. 269- 273 ,(1930) , 10.1103/PHYSREV.35.269
Makoto Ishida, Hiroyuki Matsunami, Tetsuro Tanaka, Electro‐optic effects of PLZT thin films Applied Physics Letters. ,vol. 31, pp. 433- 434 ,(1977) , 10.1063/1.89722
G.W. Farnell, I.A. Cermak, P. Silverster, S.K. Wong, Capacitance and Field Distributions for Interdigital Surface-Wave Transducers IEEE Transactions on Sonics and Ultrasonics. ,vol. 17, pp. 188- 195 ,(1970) , 10.1109/T-SU.1970.29560
G. H. HAERTLING, C. E. LAND, Hot‐Pressed (Pb,La)(Zr,Ti)O3 Ferroelectric Ceramics for Electrooptic Applications Journal of the American Ceramic Society. ,vol. 54, pp. 1- 11 ,(1971) , 10.1111/J.1151-2916.1970.TB12105.X-I1
M. Okuyama, T. Usuki, Y. Hamakawa, T. Nakagawa, Epitaxial growth of ferroelectric PLZT thin film and their optical properties Applied physics. ,vol. 21, pp. 339- 343 ,(1980) , 10.1007/BF00895925
Makoto Ishida, Shinji Tsuji, Katsutaka Kimura, Hiroyuki Matsunami, Tetsuro Tanaka, Epitaxial growth of ferroelectric PLZT [(Pb, La)(Zr, Ti)O3] thin films Journal of Crystal Growth. ,vol. 45, pp. 393- 398 ,(1978) , 10.1016/0022-0248(78)90468-2
Tsuneo Mitsuyu, Osamu Yamazaki, Kenzo Ohji, Kiyotaka Wasa, Piezoelectric thin films of zinc oxide for saw devices Ferroelectrics. ,vol. 42, pp. 233- 240 ,(1982) , 10.1080/00150198208008116