A micro level electrostatically actuated cantilever and metal contact based series RF MEMS switch for multi-band applications
作者： T. Lakshmi Narayana , K. Girija Sravani , K. Srinivasa Rao , Kun Chen
DOI: 10.1080/23311916.2017.1323367
关键词: Reliability (semiconductor) 、 Finite element method 、 Materials science 、 Series (mathematics) 、 Microelectromechanical systems 、 Electric power transmission 、 Metal 、 Voltage 、 Electrical engineering 、 Cantilever
摘要: … In this paper, a micro level electrostatically actuated cantilever and metal contact based series RF MEMS Switch is designed and analyzed using Finite Element Method Tool. The …
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