High- $Q$ Tunable Waveguide Filters Using Ohmic RF MEMS Switches
作者： Luca Pelliccia , Fabrizio Cacciamani , Paola Farinelli , Roberto Sorrentino
DOI: 10.1109/TMTT.2015.2459689
关键词:
摘要: To reduce the complexity and cost of future telecommunication systems, electrically tunable or reconfigurable filters based on radio frequency microelectromechanical systems (RF MEMS) waveguide technology constitute a very promising solution, since they allow for high $Q$ good tunability. Three concepts using ohmic RF MEMS switches are described in this paper, compared terms performance manufacturing complexity. Quality factors order 1000 tunability 5% shown both by High-Frequency Structure Simulator simulations experimental results $K$ -band.
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