Active vibration isolator based on micromachined electrostatic actuators
作者： Chong Li , Haoyue Yang , Robert N. Dean , George T. Flowers
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摘要: Parallel plate actuators (PPAs) are widely used actuators in microelectromechanical systems. A PPA can be utilised as a passive/active vibration isolator. A novel active vibration …
sci-hub.se 参考文章(5)
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