Bowl for processing semiconductor wafers
作者： Brian M. Bliven , Roy Winston Pascal
DOI:
关键词: Surface (mathematics) 、 Mathematics 、 Optics 、 Semiconductor 、 Projection (mathematics) 、 Geometry 、 Wafer
摘要: A bowl includes a bottom wall having generally circular shape. sidewall extends upwardly from the to define cylindrical chamber. The has projection that into top surface defines step in chamber and sloped between an inner of sidewall. is slightly downwardly. oriented relative such extensions angle range about 30 degrees 45 degrees. spin, rinse, dry module including method for loading semiconductor wafer also are described.
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